SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
A Professional Provider of Vacuum Solutions and Integrated Services
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Grease-lubricated turbo molecular vacuum pump DFFZ250/2000
FEATURES
1. Grease lubricated
2. Air-cooled/water-cooled
3. Installation at any angle
TECHNICAL PARAMETER
| Model | FFZ250/2000 | ||
| Inlet flange | - | LF250 | CF250 |
| Outlet flange | - | KF40 | |
| Pumping speed | L/s | 2000 | |
| Compression ratio N2/H2 | - | 108 / 104 | |
| Ultimate pressure | Pa | 6×10-7 | 6×10-6 |
| Rotation speed | rpm | 24000 | |
| Run-up time | min | ≤6 | |
| Vibration | μm | ≤0.1 | |
| Forevacuum pump speed | L/s | 2 | |
| Cooling water temperature | ≤20 | ||
| Cooling water flow | L/s | 1 | |
| Max power | kW | 750 | |
| Heater voltage | V | AC220 | |
| Installation direction | - | Any angle | |
| Weight | kg | 32/35 | |
Pumping Curve
Pump drawing
Applications
Applications of Molecular Pumps in Various Industries
Molecular pumps are high-vacuum pumps widely used in industries requiring clean, oil-free high-vacuum or ultra-high-vacuum environments. Their main application areas include:
Semiconductor and Integrated Circuit Manufacturing
Used in chip fabrication processes like lithography, etching, ion implantation, and thin-film deposition (CVD, PVD)
Ensures oil-free operation to prevent wafer contamination
Key equipment: Electron beam lithography systems, plasma etchers, MBE systems